DEVELOPMENT OF MULTIFUNCTIONAL INTELLIGENT PRESSURE
TRANSDUCERS, INCLUDING THOSE WITH DYNAMICALLY SWITCHABLE
MEASUREMENT LIMITS, BASED ON MATRIX STRUCTURES 

Anton P. Moseev, Postgraduate student, Penza State University(40 Krasnaya street, Penza, Russia), E-mail: moseew2008@mail.ru
Boris V. Tsypin, Doctor of technical sciences, professor, professor of the sub-department of rocket, space and aviation instrumentation,Penza State University (40 Krasnaya street, Penza, Russia)E-mail: rkap@pnzgu.ru
Sergey A. Brostilov, Candidate of technical sciences, associate professor, associate professor of the sub-department of radio equipment design and production, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: ser-brostilov@yandex.ru
Pavel S. Gorshkov, Doctor of technical sciences, general director, LLC "NPO Nauka Soft" (build. 3, 9 Godovikova street, Moscow, Russia), E-mail: 7498405@mail.ru
Nikolai A. Kuzin, Student, Moscow Road Institute (Technical University) (64 Leningradsky avenue, Moscow, Russia), E-mail: sputnik1985nk3y@mail.ru

Background. The studied direction of technology development (matrix structures integrated into distributed clusters and multifunctional intelligent pressure transducers based on matrix structures integrated into distributed clusters) is relevant and promising. Materials and methods. The paper developed generalized principles of construction of multifunctional intelligent pressure transducers, including those with dynamically switched measurement limits, based on matrix structures integrated into distributed clusters. Results. Based on theoretical studies, a structure of a multifunctional intelligent pressure transducer in the range from 0 to 50 bar was manufactured. At a pressure of 1 bar, the deviation of membrane 1 was 3.5 μm, membrane 2 – 0.3 μm. Conclusions. Experiments with the manufactured sample confirmed the validity of the calculations, including the linearity of the pressure sensor array.

semiconductor pressure sensor, measurement, silicon sensitive element, piezoresistors, polyimide layer, elastic pressed interconnection technology

Moseev A.P., Tsypin B.V., Brostilov S.A., Gorshkov P.S., Kuzin N.A. Development of multifunctional intelligent pressure transducers, including those with dynamically switchable measurement limits, based on matrix structures. Nadezhnost' i kachestvo slozhnykh sistem = Reliability and quality of complex systems. 2025;(1):86–94. (In Russ.). doi: 10.21685/2307-4205-2025-1-11